US 9239237 B2 – Optical alignment apparatus and methodology for a video based metrology tool

US 9239237 B2

ABSTRACT
A system for quickly aligning a test optic with various com-ponents of an optical metrology tool. A collimated target is presented to a beamsplitting reference surface located on a positioning system for holding and manipulating the test optic. Video images of the target and its reflection from the reference surface are displayed for analysis and visualization so that any tilt between the reference surface and the optical axis of the collimated beam can be removed to align the test optic. After alignment, the video based system is used to quickly measure and display in real-time a variety of perfor-mance characteristics of optical components such as lenses. The metrology system is under the control of a computer which uses a windowing software program to provide the user with a graphical user interface by which the various compo-nents of the system and test lenses may be aligned and char-acterized.